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1Preparation of AlN thin films for film bulk acoustic resonator application by radio frequency sputtering
Author(s):Kan LI, Hao JIN, De-miao WANG, Yi-...  Clicked:7044  Download:3638  Cited:3  <Full Text>
Journal of Zhejiang University Science A  2009 Vol.10 No.3 P.464-470  DOI:10.1631/jzus.A0820572
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