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Frontiers of Information Technology & Electronic Engineering 

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Enhancing the long-range nanopositioning of a Lorentz force actuator, electronically


Author(s):  Bimal Jeet GOTEEA, Qianjun ZHANG, Wei DONG

Affiliation(s):  State Key Laboratory of Robotics and Systems, Harbin Institute of Technology, Harbin 150001, China

Corresponding email(s):  bj.goteea@gmail.com, zhang_qj@stu.hit.edu.cn, dongwei@hit.edu.cn

Key Words:  Nanopositioning; Flexure guides; Long range; Voice coil motor


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Bimal Jeet GOTEEA, Qianjun ZHANG, Wei DONG. Enhancing the long-range nanopositioning of a Lorentz force actuator, electronically[J]. Frontiers of Information Technology & Electronic Engineering , 1998, -1(3): .

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Abstract: 
This paper presents a precision centimeter-range positioner based on a Lorentz force actuator using flexure guides. An additional digital-to-analog converter (DAC) and an operational amplifier (op amp) circuit together with a suitable controller are used to enhance the positioning accuracy to the nanometer level. First, a suitable coil is designed for the actuator based on the stiffness of the flexure guide model. The flexure mechanism and actuator performance are then verified with an FEA. Based on these, a means to enhance the positioning performance electronically is presented together with the control scheme. Finally, a prototype is fabricated, and the performance is evaluated. This work features a range of 10 mm with a resolution of 10 nm. The proposed scheme can be extended to other systems.

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