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Journal of Zhejiang University SCIENCE A
ISSN 1673-565X(Print), 1862-1775(Online), Monthly
2000 Vol.1 No.3 P.269-274
A NOVEL STRUCTURE OF ALL-OPTICAL TYPE SILICON MICRORESONATOR
Abstract: A novel All-Optical type Silicon MicroResonator (AOSMR), with exciting and testing optical fibers is reported in this paper. It consists of a ridge optical waveguide and input and output optical fibers to pick up vibrations. The advantages include simplicity in structure and convenience in operation. Both theoretical analysis and experimental results showed that the new structure has large misalignment tolerance between the fiber and vibrator. The optical length of the fiber does not affect the output signal. In addition, the resonant frequency of the vibrator is independent of the internal stress of the silicon wafer.
Key words: all-optical type, microresonator, cantilever, ridge waveguide, optical fiber, pigtail
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DOI:
10.1631/jzus.2000.0269
CLC number:
TN253, TB532
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Received:
1999-08-12
Revision Accepted:
2000-01-06
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