Abstract: A new aluminum thin film percolation system, deposited on glass and silicon wafer surfaces by a vapor deposition method, was investigated. By using the expansive and mobile behaviors of the silicone oil, the Al films are quenched gradually by the silicone oil during the deposition process, The R-I behavior of the film system was studied, and the anomalous conductivity indicated that, at very low current, the hopping and tunneling effects in the films are much stronger than those of the normal film systems.

Key words: thin film, percolation, hopping conductance, tunneling effect

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