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Journal of Zhejiang University SCIENCE C
ISSN 1869-1951(Print), 1869-196x(Online), Monthly
2013 Vol.14 No.1 P.65-74
Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers
Abstract: This paper presents the design principles and fabrication techniques for simultaneously forming non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers by masked-maskless combined anisotropic etching. Four resonant beams are located at the surface of a silicon substrate, whereas the gravity centre of a proof mass lies within the neutral plane of four crab-leg supporting beams on the same substrate. Compared with early reported mechanical structures, the simple structure not only eliminates the bending moments caused by in-plane acceleration, and thereby avoiding the rotation of the proof mass, but also providing sufficiently small rigidity to X and Y axes accelerations, potentially leading to a large sensitivity for measuring the in-plane acceleration.
Key words: Resonant accelerometer, Maskless etching, Bulk micromachining technology, Microelectromechanical system (MEMS), Microsensor
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DOI:
10.1631/jzus.C1200251
CLC number:
TP212
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On-line Access:
2013-01-03
Received:
2012-08-24
Revision Accepted:
2012-11-19
Crosschecked:
2012-12-14