Abstract: Differential capacitive detection has been widely used in the displacement measurement of the proof mass of vibratory gyroscopes, but it did not achieve high resolutions in angle detection of rotational gyroscopes due to restrictions in structure, theory, and interface circuitry. In this paper, a differential capacitive detection structure is presented to measure the tilt angle of the rotor of a novel rotational gyroscope. A mathematical model is built to study how the structure’s capacitance changes with the rotor tilt angles. The relationship between differential capacitance and structural parameters is analyzed, and preliminarily optimized size parameters are adopted. A low-noise readout interface circuit is designed to convert differential capacitance changes to voltage signals. Rate table test results of the gyroscope show that the smallest resolvable tilt angle of the rotor is less than 0.47′′ (0.00013°), and the nonlinearity of the angle detection structure is 0.33%, which can be further improved. The results indicate that the proposed detection structure and the circuitry are helpful for a high accuracy of the gyroscope.

Key words: Micro-angle detection, Differential capacitive structure, Rotational gyroscope, Structure optimization

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