Abstract: We propose a general method of designing phase-shifting algorithms for grating lateral shearing interferometry. The algorithms compensate for the zeroth-order effect error and phase-shifting error in varying degrees. We derive a general expression of the phase-shifting algorithm in grating lateral shearing interferometer and introduce the corresponding design method. Based on the expression and method, four phase-shifting algorithms are designed with different phase-shifting errors to obtain high measurement accuracy. A new 13-frame phase-shifting algorithm is designed and simulated with a large zeroth-order effect. Simulation results verify the general expression and the corresponding design method.

Key words: Interferometry, Phase measurement, Phase-shifting algorithms

Please provide your name, email address and a comment

Your Name: Affili: E-Mail Address:

Comment (Please comment in English):


Verification Code(click to change a pic):