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Frontiers of Information Technology & Electronic Engineering
ISSN 2095-9184 (print), ISSN 2095-9230 (online)
2019 Vol.20 No.5 P.631-654
Displacement measuring grating interferometer: a review
Abstract: A grating interferometer, called the “optical encoder,” is a commonly used tool for precise displacement measurements. In contrast to a laser interferometer, a grating interferometer is insensitive to the air refractive index and can be easily applied to multi-degree-of-freedom measurements, which has made it an extensively researched and widely used device. Classified based on the measuring principle and optical configuration, a grating interferometer experiences three distinct stages of development: homodyne, heterodyne, and spatially separated heterodyne. Compared with the former two, the spatially separated heterodyne grating interferometer could achieve a better resolution with a feature of eliminating periodic nonlinear errors. Meanwhile, numerous structures of grating interferometers with a high optical fold factor, a large measurement range, good usability, and multi-degree-of-freedom measurements have been investigated. The development of incremental displacement measuring grating interferometers achieved in recent years is summarized in detail, and studies on error analysis of a grating interferometer are briefly introduced.
Key words: Grating interferometer, Optical encoder, Displacement measurement, Precision measurement
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DOI:
10.1631/FITEE.1800708
CLC number:
TH744.3; TH822
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On-line Access:
2019-06-10
Received:
2018-11-07
Revision Accepted:
2019-02-23
Crosschecked:
2019-05-08