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Frontiers of Information Technology & Electronic Engineering
ISSN 2095-9184 (print), ISSN 2095-9230 (online)
2023 Vol.24 No.7 P.1080-1092
Electronically enhancing the long-range nanopositioning accuracy of a Lorentz force actuator
Abstract: This paper presents a precision centimeter-range positioner based on a Lorentz force actuator using flexure guides. An additional digital-to-analog converter and an operational amplifier (op amp) circuit together with a suitable controller are used to enhance the positioning accuracy to the nanometer level. First, a suitable coil is designed for the actuator based on the stiffness of the flexure guide model. The flexure mechanism and actuator performance are then verified with finite element analysis. Based on these, a means to enhance the positioning performance electronically is presented together with the control scheme. Finally, a prototype is fabricated, and the performance is evaluated. This positioner features a range of 10 mm with a resolution of 10 nm. The proposed scheme can be extended to other systems.
Key words: Nanopositioning; Flexure guides; Long range; Voice coil motor; Lorentz force actuator
哈尔滨工业大学机器人技术与系统国家重点实验室，中国哈尔滨市，150001
摘要：本文展现了一种基于洛伦兹力驱动器和柔顺导向的精密厘米级定位器。通过使用一个额外的数模转换器（DAC）和运算放大器（opamp）电路，以及合适的控制器将定位精度提高到纳米级。首先，基于柔顺导向模型的刚度为驱动器设计了恰当的线圈。然后通过有限元分析（FEA）验证了柔顺机构和驱动器的性能。基于此，提出一种通过电子方式提升定位性能的方法及控制方案。最后，构建了原理样机并对其性能进行评估。该定位器的特色在于其在10mm行程内实现10 nm分辨率。所提出的方案可以拓展适用于其他同类型系统。
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DOI:
10.1631/FITEE.2200255
CLC number:
TM36; TN710
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On-line Access:
2023-07-24
Received:
2022-06-12
Revision Accepted:
2022-09-16
Crosschecked:
2023-07-24