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Journal of Zhejiang University SCIENCE C

ISSN 1869-1951(Print), 1869-196x(Online), Monthly

2011 Vol.12 No.7 P.614-614

Erratum to: A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segments and control sites

Bin Lin, Xiao-lang Yan, Zheng Shi, Yi-wei Yang

Institute of VLSI Design, Zhejiang University, Hangzhou 310027, China

linbin@vlsi.zju.edu.cn

Abstract: In the online version of the original article, Fig. 11 was incorrect. The correct version is given.

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The online version of the original article can be found at doi:10.1631/jzus.C1000219


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DOI:

10.1631/jzus.C10e0219

CLC number:

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On-line Access:

2024-08-27

Received:

2023-10-17

Revision Accepted:

2024-05-08

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