Electrical characterization of integrated passive devices using thin film technology for 3D integration

Xin Sun, Yun-hui Zhu, Zhen-hua Liu, Qing-hu Cui, Sheng-lin Ma, Jing Chen, Min Miao, Yu-feng Jin

DOI: 10.1631/jzus.C12MNT01 Downloaded: 4119 Clicked: 8766 Cited: 1 Commented: 0(p.235-243) <Full Text>

Low temperature Si/Si wafer direct bonding using a plasma activated method

Dong-ling Li, Zheng-guo Shang, Sheng-qiang Wang, Zhi-yu Wen

DOI: 10.1631/jzus.C12MNT02 Downloaded: 6177 Clicked: 8578 Cited: 5 Commented: 0(p.244-251) <Full Text>

A planar capacitive sensor for 2D long-range displacement measurement

Jian-ping Yu, Wen Wang, Ke-qing Lu, De-qing Mei, Zi-chen Chen

DOI: 10.1631/jzus.C12MNT03 Downloaded: 3111 Clicked: 8366 Cited: 4 Commented: 0(p.252-257) <Full Text>

Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology

Ji-jun Xiong, Shi-jun Zheng, Ying-ping Hong, Jun Li, Ying-lin Wang, Wei Wang, Qiu-lin Tan

DOI: 10.1631/jzus.C12MNT04 Downloaded: 3489 Clicked: 9046 Cited: 22 Commented: 0(p.258-263) <Full Text>

High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation

Jun Xu, Xin Li, Jin-hua Duan, Hai-bo Xu

DOI: 10.1631/jzus.C12MNT05 Downloaded: 3438 Clicked: 8139 Cited: 1 Commented: 0(p.264-273) <Full Text>

A trapezoidal cantilever density sensor based on MEMS technology

Li-bo Zhao, Long-qi Xu, Gui-ming Zhang, Yu-long Zhao, Xiao-po Wang, Zhi-gang Liu, Zhuang-de Jiang

DOI: 10.1631/jzus.C12MNT06 Downloaded: 3203 Clicked: 7647 Cited: 2 Commented: 0(p.274-278) <Full Text>

High Q, high frequency, high overtone bulk acoustic resonator with ZnO films

Meng-wei Liu, Ming-bo Zhu, Jun-hong Li, Cheng-hao Wang

DOI: 10.1631/jzus.C12MNT07 Downloaded: 3364 Clicked: 7887 Cited: 1 Commented: 0(p.279-282) <Full Text>

Resin-bonded NdFeB micromagnets for integration into electromagnetic vibration energy harvesters

Pei-hong Wang, Kai Tao, Zhuo-qing Yang, Gui-fu Ding

DOI: 10.1631/jzus.C12MNT08 Downloaded: 3030 Clicked: 7683 Cited: 3 Commented: 0(p.283-287) <Full Text>

Ka-band ultra low voltage miniature sub-harmonic resistive mixer with a new broadside coupled Marchand balun in 0.18-μm CMOS technology

Ge-liang Yang, Zhi-gong Wang, Zhi-qun Li, Qin Li, Fa-en Liu, Zhu Li

DOI: 10.1631/jzus.C1200369 Downloaded: 4052 Clicked: 9170 Cited: 1 Commented: 0(p.288-295) <Full Text>

Predictive current control of multi-pulse flexible-topology thyristor AC-DC converter

Da-min Zhang, Shi-tao Wang, Hui-pin Lin, Zheng-yu Lu

DOI: 10.1631/jzus.C1200283 Downloaded: 4863 Clicked: 8614 Cited: 2 Commented: 0(p.296-310) <Full Text>