CLC number: TH822; TH744.3
On-line Access: 2024-08-27
Received: 2023-10-17
Revision Accepted: 2024-05-08
Crosschecked: 2021-10-09
Cited: 0
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Citations: Bibtex RefMan EndNote GB/T7714
Di Chang, Pengcheng Hu, Jiubin Tan. Fused-like angles: replacement for roll-pitch-yaw angles for a six-degree-of-freedom grating interferometer[J]. Frontiers of Information Technology & Electronic Engineering, 2021, 22(12): 1677-1684.
@article{title="Fused-like angles: replacement for roll-pitch-yaw angles for a six-degree-of-freedom grating interferometer",
author="Di Chang, Pengcheng Hu, Jiubin Tan",
journal="Frontiers of Information Technology & Electronic Engineering",
volume="22",
number="12",
pages="1677-1684",
year="2021",
publisher="Zhejiang University Press & Springer",
doi="10.1631/FITEE.2000432"
}
%0 Journal Article
%T Fused-like angles: replacement for roll-pitch-yaw angles for a six-degree-of-freedom grating interferometer
%A Di Chang
%A Pengcheng Hu
%A Jiubin Tan
%J Frontiers of Information Technology & Electronic Engineering
%V 22
%N 12
%P 1677-1684
%@ 2095-9184
%D 2021
%I Zhejiang University Press & Springer
%DOI 10.1631/FITEE.2000432
TY - JOUR
T1 - Fused-like angles: replacement for roll-pitch-yaw angles for a six-degree-of-freedom grating interferometer
A1 - Di Chang
A1 - Pengcheng Hu
A1 - Jiubin Tan
J0 - Frontiers of Information Technology & Electronic Engineering
VL - 22
IS - 12
SP - 1677
EP - 1684
%@ 2095-9184
Y1 - 2021
PB - Zhejiang University Press & Springer
ER -
DOI - 10.1631/FITEE.2000432
Abstract: representation of orientation is important in a six-degree-of-freedom grating interferometer but only a few studies have focused on this topic. Roll-pitch-yaw angles, widely used in aviation, navigation, and robotics, are now being brought to the field of multi-degree-of-freedom interferometric measurement. However, the roll-pitch-yaw angles are not the exact definitions the metrologists expected in interferometry, because they require a certain sequential order of rotations and may cause errors in describing complicated rotations. The errors increase as the tip and tilt angles of the grating increase. Therefore, a replacement based on fused angles in robotics is proposed and named “fused-like angles.” The fused-like angles are error-free, so they are more in line with the definitions in grating interferometry and more suitable for six-degree-of-freedom measurements. fused-like angles have already been used in research on the kinematic model and decoupling algorithm of the six-degree-of-freedom grating interferometer.
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