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Piezoelectric ultrasonic coupling-based polishing of micro-tapered holes with abrasive flow
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Gaoan ZHENG1,2, Xiaoxing WENG1,4, Tong WANG3, Pu XU1, Weixin XU1, Lin LI1, Xuefeng XU1, Dapeng TAN1. Piezoelectric ultrasonic coupling-based polishing of micro-tapered holes with abrasive flow[J]. Journal of Zhejiang University Science A, 1998, -1(-1): .
@article{title="Piezoelectric ultrasonic coupling-based polishing of micro-tapered holes with abrasive flow",
author="Gaoan ZHENG1,2, Xiaoxing WENG1,4, Tong WANG3, Pu XU1, Weixin XU1, Lin LI1, Xuefeng XU1, Dapeng TAN1",
journal="Journal of Zhejiang University Science A",
volume="-1",
number="-1",
pages="",
year="1998",
publisher="Zhejiang University Press & Springer",
doi="10.1631/jzus.A2400343"
}
%0 Journal Article
%T Piezoelectric ultrasonic coupling-based polishing of micro-tapered holes with abrasive flow
%A Gaoan ZHENG1
%A 2
%A Xiaoxing WENG1
%A 4
%A Tong WANG3
%A Pu XU1
%A Weixin XU1
%A Lin LI1
%A Xuefeng XU1
%A Dapeng TAN1
%J Journal of Zhejiang University SCIENCE A
%V -1
%N -1
%P
%@ 1673-565X
%D 1998
%I Zhejiang University Press & Springer
%DOI 10.1631/jzus.A2400343
TY - JOUR
T1 - Piezoelectric ultrasonic coupling-based polishing of micro-tapered holes with abrasive flow
A1 - Gaoan ZHENG1
A1 - 2
A1 - Xiaoxing WENG1
A1 - 4
A1 - Tong WANG3
A1 - Pu XU1
A1 - Weixin XU1
A1 - Lin LI1
A1 - Xuefeng XU1
A1 - Dapeng TAN1
J0 - Journal of Zhejiang University Science A
VL - -1
IS - -1
SP -
EP -
%@ 1673-565X
Y1 - 1998
PB - Zhejiang University Press & Springer
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DOI - 10.1631/jzus.A2400343
Abstract: The primary determinant of microfluidic chip performance is the surface quality of the micro-tapered holes. Due to the small scale of these holes and the high hardness of the surface attachments, the commonly used abrasive jet polishing method can encounter difficulties. Therefore, we propose a novel active multiphase field material removal technique. This technique is based on piezoelectric ultrasonically coupled abrasive particle flow. To study the connection between the impulse properties of the flow field and the micro-tapered holes asymptotic expansion-contraction process, a multiphase hybrid fluid dynamics model is established. Simultaneously, we investigate the process of abrasive-wall contact during the cycles of expansion and contraction, revealing the effects of erosion and polishing on different areas of the hole surface. To achieve accurate regu-lation of a desired polishing area, a quantitative relationship between the vibrational properties of piezoelectric ceramics and the erosional effect of micro-tapered holes is established. Finally, an experimental platform for micro-tapered hole polishing is built to validate the method.
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