CLC number: TP212
On-line Access: 2024-08-27
Received: 2023-10-17
Revision Accepted: 2024-05-08
Crosschecked: 2021-09-21
Cited: 0
Clicked: 5309
Chen LI, Mangu JIA, Yingping HONG, Yanan XUE, Jijun XIONG. Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for bending structure surfaces[J]. Frontiers of Information Technology & Electronic Engineering, 2022, 23(5): 801-809.
@article{title="Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for bending structure surfaces",
author="Chen LI, Mangu JIA, Yingping HONG, Yanan XUE, Jijun XIONG",
journal="Frontiers of Information Technology & Electronic Engineering",
volume="23",
number="5",
pages="801-809",
year="2022",
publisher="Zhejiang University Press & Springer",
doi="10.1631/FITEE.2100236"
}
%0 Journal Article
%T Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for bending structure surfaces
%A Chen LI
%A Mangu JIA
%A Yingping HONG
%A Yanan XUE
%A Jijun XIONG
%J Frontiers of Information Technology & Electronic Engineering
%V 23
%N 5
%P 801-809
%@ 2095-9184
%D 2022
%I Zhejiang University Press & Springer
%DOI 10.1631/FITEE.2100236
TY - JOUR
T1 - Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for bending structure surfaces
A1 - Chen LI
A1 - Mangu JIA
A1 - Yingping HONG
A1 - Yanan XUE
A1 - Jijun XIONG
J0 - Frontiers of Information Technology & Electronic Engineering
VL - 23
IS - 5
SP - 801
EP - 809
%@ 2095-9184
Y1 - 2022
PB - Zhejiang University Press & Springer
ER -
DOI - 10.1631/FITEE.2100236
Abstract: We propose an inductor-capacitor (LC) wireless passive flexible accelerometer, which eliminates the difficulty in measuring the acceleration on the surface of a bending structure. The accelerometer is composed of a flexible polyimide (PI) substrate and a planar spiral inductance coil (thickness 300 nm), made using micro-electro-mechanical system (MEMS) technology. It can be bent or folded at will, and can be attached firmly to the surface of objects with a bending structure. The principle of radio frequency wireless transmission is used to measure the acceleration signal by changing the distance between the accelerometer and the antenna. Compared with other accelerometers with a lead wire, the accelerometer can prevent the lead from falling off in the course of vibration, thereby prolonging its service life. Through establishment of an experimental platform, when the distance between the antenna and accelerometer was 5 mm, the characterization of the surface of bending structures demonstrated the sensing capabilities of the accelerometer at accelerations of 20‒100 m/s2. The results indicate that the acceleration and peak-to-peak output voltage were nearly linear, with accelerometer sensitivity reaching 0.27 mV/(m·s−2). Moreover, the maximum error of the accelerometer was less than 0.037%.
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