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Abstract: This paper presents a precision centimeter-range positioner based on a lorentz force actuator using flexure guides. An additional digital-to-analog converter and an operational amplifier (op amp) circuit together with a suitable controller are used to enhance the positioning accuracy to the nanometer level. First, a suitable coil is designed for the actuator based on the stiffness of the flexure guide model. The flexure mechanism and actuator performance are then verified with finite element analysis. Based on these, a means to enhance the positioning performance electronically is presented together with the control scheme. Finally, a prototype is fabricated, and the performance is evaluated. This positioner features a range of 10 mm with a resolution of 10 nm. The proposed scheme can be extended to other systems.

以电子方式提升洛伦兹力驱动器的大行程纳米定位精度

[1]Baronti F, Lazzeri A, Roncella R, et al., 2013. Design and characterization of a robotized gearbox system based on voice coil actuators for a Formula SAE race car. IEEE/ASME Trans Mechatron, 18(1):53-61.

[2]Cheung NC, Cheung BMY, 1997. Modelling and control of a high speed, long travel, dual voice coil actuator. Proc 2^nd Int Conf on Power Electronics and Drive Systems, p.270-274.

[3]Choi YM, Gweon DG, 2011. A high-precision dual-servo stage using Halbach linear active magnetic bearings. IEEE/ASME Trans Mechatron, 16(5):925-931.

[4]Christiansen B, Maurer H, Zirn O, 2008. Optimal control of a voice-coil-motor with coulombic friction. Proc 47^th IEEE Conf on Decision and Control, p.1557-1562.

[5]Devasia S, Eleftheriou E, Moheimani SOR, 2007. A survey of control issues in nanopositioning. IEEE Trans Contr Syst Technol, 15(5):802-823.

[6]Dimitrova Z, Tari M, Lanusse P, et al., 2019. Robust control for an electromagnetic actuator for a camless engine. Mechatronics, 57:109-128.

[7]Dong W, Tang J, ElDeeb Y, 2009. Design of a linear-motion dual-stage actuation system for precision control. Smart Mater Struct, 18(9):095035.

[8]Gao HL, Zhang FJ, Wang EH, et al., 2019. Optimization and simulation of a voice coil motor for fuel injectors of two-stroke aviation piston engine. Adv Mech Eng, 11(4):1-17.

[9]Gu GY, Zhu LM, Su CY, et al., 2016. Modeling and control of piezo-actuated nanopositioning stages: a survey. IEEE Trans Autom Sci Eng, 13(1):313-332.

[10]Hiemstra DB, Parmar G, Awtar S, 2014. Performance trade offs posed by moving magnet actuators in flexure-based nanopositioning. IEEE/ASME Trans Mechatron, 19(1):201-212.

[11]Howell LL, 2013. Compliant mechanisms. Proc 21‍^st Century Kinematics, p.189-216.

[12]Kim JY, Ahn D, 2020. Analysis of high force voice coil motors for magnetic levitation. Actuators, 9(4):133.

[13]Kim KH, Choi YM, Gweon DG, et al., 2006. Design of decoupled dual servo stage with voice coil motor and linear motor for XY long stroke ultra-precision scanning system. Proc SPIE, 6040:60401C.

[14]Kim WJ, Trumper DL, Lang JH, 1998. Modeling and vector control of planar magnetic levitator. IEEE Trans Ind Appl, 34(6):1254-1262.

[15]Lee HS, Tomizuka M, 1996. Robust motion controller design for high-accuracy positioning systems. IEEE Trans Ind Electron, 43(1):48-55.

[16]Leung C, Lu Z, Esfandiari N, et al., 2011. Automated sperm immobilization for intracytoplasmic sperm injection. IEEE Trans Biomed Eng, 58(4):935-942.

[17]Lin CJ, Yau HT, Tian YC, 2013. Identification and compensation of nonlinear friction characteristics and precision control for a linear motor stage. IEEE/ASME Trans Mechatron, 18(4):1385-1396.

[18]Lin R, Li YZ, Zhang YX, et al., 2019. Design of a flexure-based mixed-kinematic XY high-precision positioning platform with large range. Mech Mach Theory, 142:103609.

[19]Makarovic J, 2006. Lightweight Positioning: Design and Optimization of an Actuator with Two Controlled Degrees of Freedom. PhD Thesis, Technische Universiteit Eindhoven, Eindhoven, the Netherlands.

[20]Mercorelli P, 2017. A motion-sensorless control for intake valves in combustion engines. IEEE Trans Ind Electron, 64(4):3402-3412.

[21]Pham HH, Chen IM, 2005. Stiffness modeling of flexure parallel mechanism. Prec Eng, 29(4):467-478.

[22]Probst M, Fluckiger M, Pané S, et al., 2009. Manufacturing of a hybrid acoustic transmitter using an advanced microassembly system. IEEE Trans Ind Electron, 56(7):‍2657-2666.

[23]Shan GQ, Li YZ, Zhang LW, et al., 2015. Contributed review: application of voice coil motors in high-precision positioning stages with large travel ranges. Rev Sci Instrum, 86(10):101501.

[24]Sharon A, Hogan N, Hardt DE, 1993. The macro/micro manipulator: an improved architecture for robot control. Robot Comput Integr Manuf, 10(3):209-222.

[25]Shinno H, Hashizume H, 2001. High speed nanometer positioning using a hybrid linear motor. CIRP Ann, 50(1):243-246.

[26]Takrouri M, Dhaouadi R, 2016. ADALINE-based friction identification of a linear voice coil DC motor. Proc American Control Conf, p.3062-3068.

[27]Tan KK, Huang SN, Liang WY, et al., 2012. Development of a spherical air bearing positioning system. IEEE Trans Ind Electron, 59(9):3501-3509.

[28]Teo TJ, Chen IM, Yang GL, et al., 2007. Magnetic field modeling of a dual-magnet configuration. J Appl Phys, 102(7):074924.

[29]Teo TJ, Chen IM, Kiew CM, et al., 2010. Model-based control of a high-precision imprinting actuator for micro-channel fabrications. Proc IEEE Int Conf on Robotics and Automation, p.3159-3164.

[30]Teo TJ, Yang GL, Chen IM, 2014. A large deflection and high payload flexure-based parallel manipulator for UV nanoimprint lithography: Part I. Modeling and analyses. Prec Eng, 38(4):861-871.

[31]Teo TJ, Bui VP, Yang G, et al., 2015. Millimeters-stroke nanopositioning actuator with high positioning and thermal stability. IEEE/ASME Trans Mechatron, 20(6):2813-2823.

[32]Wang TW, Li YZ, Zhang YX, et al., 2021. Design of a flexure-based parallel XY micropositioning stage with millimeter workspace and high bandwidth. Sens Actuat A Phys, 331:112899.

[33]Xu QS, 2012. New flexure parallel-kinematic micropositioning system with large workspace. IEEE Trans Rob, 28(2):478-491.

[34]Xu QS, 2013. Design, testing and precision control of a novel long-stroke flexure micropositioning system. Mech Mach Theory, 70:209-224.

[35]Xu QS, 2014. Design and development of a compact flexure-based XY precision positioning system with centimeter range. IEEE Trans Ind Electron, 61(2):893-903.

[36]Yang M, Zhang C, Huang XL, et al., 2022. A long-stroke nano positioning stage with annular flexure guides. IEEE/ASME Trans Mechatron, 27(3):1570-1581.

[37]Yoo YM, Kwon BI, 2007. A dual-servo type VCM for a nano-level measurement system. J Electr Eng Technol, 2(1):50-54.

[38]Zhu HY, Teo TJ, Pang CK, 2018. Analytical model-based multiphysics optimization of a nanopositioning electromagnetic actuator. IEEE Trans Ind Electron, 65(1):478-487.

[39]Zhu HY, Teo TJ, Pang CK, 2019. Magnetically levitated parallel actuated dual-stage (maglev-PAD) system for six-axis precision positioning. IEEE/ASME Trans Mechatron, 24(4):1829-1838.