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Enhancing the long-range nanopositioning of a Lorentz force actuator, electronically
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Bimal Jeet GOTEEA, Qianjun ZHANG, Wei DONG. Enhancing the long-range nanopositioning of a Lorentz force actuator, electronically[J]. Frontiers of Information Technology & Electronic Engineering, 1998, -1(-1): .
@article{title="Enhancing the long-range nanopositioning of a Lorentz force actuator, electronically",
author="Bimal Jeet GOTEEA, Qianjun ZHANG, Wei DONG",
journal="Frontiers of Information Technology & Electronic Engineering",
volume="-1",
number="-1",
pages="",
year="1998",
publisher="Zhejiang University Press & Springer",
doi="10.1631/FITEE.2200255"
}
%0 Journal Article
%T Enhancing the long-range nanopositioning of a Lorentz force actuator, electronically
%A Bimal Jeet GOTEEA
%A Qianjun ZHANG
%A Wei DONG
%J Journal of Zhejiang University SCIENCE C
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%D 1998
%I Zhejiang University Press & Springer
%DOI 10.1631/FITEE.2200255
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A1 - Qianjun ZHANG
A1 - Wei DONG
J0 - Journal of Zhejiang University Science C
VL - -1
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%@ 2095-9184
Y1 - 1998
PB - Zhejiang University Press & Springer
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DOI - 10.1631/FITEE.2200255
Abstract: This paper presents a precision centimeter-range positioner based on a Lorentz force actuator using flexure guides. An additional digital-to-analog converter (DAC) and an operational amplifier (op amp) circuit together with a suitable controller are used to enhance the positioning accuracy to the nanometer level. First, a suitable coil is designed for the actuator based on the stiffness of the flexure guide model. The flexure mechanism and actuator performance are then verified with an FEA. Based on these, a means to enhance the positioning performance electronically is presented together with the control scheme. Finally, a prototype is fabricated, and the performance is evaluated. This work features a range of 10 mm with a resolution of 10 nm. The proposed scheme can be extended to other systems.
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