CLC number: TH703.2
On-line Access: 2024-08-27
Received: 2023-10-17
Revision Accepted: 2024-05-08
Crosschecked: 2016-12-12
Cited: 1
Clicked: 5717
Wei-zhong Wang, Ji Liang, Yong Ruan, Wei Pang, Zheng You. Design and fabrication of an surface acoustic wave resonator based on AlN/4H-SiC material for harsh environments[J]. Journal of Zhejiang University Science A, 2017, 18(1): 67-74.
@article{title="Design and fabrication of an surface acoustic wave resonator based on AlN/4H-SiC material for harsh environments",
author="Wei-zhong Wang, Ji Liang, Yong Ruan, Wei Pang, Zheng You",
journal="Journal of Zhejiang University Science A",
volume="18",
number="1",
pages="67-74",
year="2017",
publisher="Zhejiang University Press & Springer",
doi="10.1631/jzus.A1600028"
}
%0 Journal Article
%T Design and fabrication of an surface acoustic wave resonator based on AlN/4H-SiC material for harsh environments
%A Wei-zhong Wang
%A Ji Liang
%A Yong Ruan
%A Wei Pang
%A Zheng You
%J Journal of Zhejiang University SCIENCE A
%V 18
%N 1
%P 67-74
%@ 1673-565X
%D 2017
%I Zhejiang University Press & Springer
%DOI 10.1631/jzus.A1600028
TY - JOUR
T1 - Design and fabrication of an surface acoustic wave resonator based on AlN/4H-SiC material for harsh environments
A1 - Wei-zhong Wang
A1 - Ji Liang
A1 - Yong Ruan
A1 - Wei Pang
A1 - Zheng You
J0 - Journal of Zhejiang University Science A
VL - 18
IS - 1
SP - 67
EP - 74
%@ 1673-565X
Y1 - 2017
PB - Zhejiang University Press & Springer
ER -
DOI - 10.1631/jzus.A1600028
Abstract: Surface acoustic wave (SAW) sensors and micro-electromechanical system (MEMS) technology provide a promising solution for measurement in harsh environments such as gas turbines. In this paper, a SAW resonator (size: 1107 µm× 721 µm) based on the alN/4H-SiC multilayer structure is designed and simulated. A MEMS-compatible fabrication process is employed to fabricate the resonator. The results show that highly c-axis-oriented AlN thin films deposited on the 4H-SiC substrate are obtained, with that the diffraction peak of AlN is 36.10° and the lowest full width at half maximum (FWHM) value is only 1.19°. The test results of the network analyzer are consistent with the simulation curve, which is very encouraging and indicates that our work is a significant attempt to solve the measurement problems mainly including high temperature stability of sensitive structures and the heat transmission of leads in harsh environments. It is essential to get the best performance of SAW resonator, optimize and characterize the behaviors in high temperatures in future research.
In this work, AlN thin films growth on the 4H-SiC substrate are characterized and the behaviors of the surface acoustic wave devices on AlN/4H-SiC media are also studied. As suggested by the authors, this material stack is potential for passive wireless SAW sensors in the harsh environment.
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