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index	Title
1	Preparation of AlN thin films for film bulk acoustic resonator application by radio frequency sputtering Author(s):Kan LI, Hao JIN, De-miao WANG, Yi-...  Clicked:6913  Download:3581  Cited:3  <Full Text> Journal of Zhejiang University Science A  2009 Vol.10 No.3 P.464-470  DOI:10.1631/jzus.A0820572

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