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1A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segment...
Author(s):Bin Lin, Xiao-lang Yan, Zheng Shi,...  Clicked:8327  Download:3920  Cited:4  <Full Text>
Journal of Zhejiang University Science C  2011 Vol.12 No.5 P.436-442  DOI:10.1631/jzus.C1000219
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