Deep search:Searching for "Piezoelectric thin film" in 'KEYWORDGot 2 items.
index Title
1Preparation of AlN thin films for film bulk acoustic resonator application by radio frequency sputtering
Author(s):Kan LI, Hao JIN, De-miao WANG, Yi-...  Clicked:6193  Download:3037  Cited:3  <Full Text>
Journal of Zhejiang University Science A  2009 Vol.10 No.3 P.464-470  DOI:10.1631/jzus.A0820572
2Thin film bulk acoustic wave filters with ring-dot electrodes
Author(s):Jing Liu, Jian-ke Du, Ji Wang, Jia...  Clicked:2948  Download:1545  Cited:0  <Full Text>  <PPT> 1348
Journal of Zhejiang University Science A  2018 Vol.19 No.10 P.786-795  DOI:10.1631/jzus.A1700396
Journal of Zhejiang University-SCIENCE, 38 Zheda Road, Hangzhou 310027, China
Tel: +86-571-87952783; E-mail: cjzhang@zju.edu.cn
Copyright © 2000 - 2022 Journal of Zhejiang University-SCIENCE