Deep search:Searching for "Piezoelectric thin film" in 'KEYWORDGot 2 items.
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1Preparation of AlN thin films for film bulk acoustic resonator application by radio frequency sputtering
Author(s):Kan LI, Hao JIN, De-miao WANG, Yi-...  Clicked:6877  Download:3569  Cited:3  <Full Text>
Journal of Zhejiang University Science A  2009 Vol.10 No.3 P.464-470  DOI:10.1631/jzus.A0820572
2Thin film bulk acoustic wave filters with ring-dot electrodes
Author(s):Jing Liu, Jian-ke Du, Ji Wang, Jia...  Clicked:3760  Download:2391  Cited:0  <Full Text>  <PPT> 1583
Journal of Zhejiang University Science A  2018 Vol.19 No.10 P.786-795  DOI:10.1631/jzus.A1700396
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