Deep search:Searching for "Preferred orientation" in 'KEYWORDGot 1 item.
index Title
1Preparation of AlN thin films for film bulk acoustic resonator application by radio frequency sputtering
Author(s):Kan LI, Hao JIN, De-miao WANG, Yi-...  Clicked:6193  Download:3037  Cited:3  <Full Text>
Journal of Zhejiang University Science A  2009 Vol.10 No.3 P.464-470  DOI:10.1631/jzus.A0820572
Journal of Zhejiang University-SCIENCE, 38 Zheda Road, Hangzhou 310027, China
Tel: +86-571-87952783; E-mail: cjzhang@zju.edu.cn
Copyright © 2000 - 2022 Journal of Zhejiang University-SCIENCE