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1Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology
Author(s):Ji-jun Xiong, Shi-jun Zheng, Ying-...  Clicked:8067  Download:3161  Cited:22  <Full Text>
Journal of Zhejiang University Science C  2013 Vol.14 No.4 P.258-263  DOI:10.1631/jzus.C12MNT04
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