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1Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk...
Author(s):Jian-qiang Han, Ri-sheng Feng, Yan...  Clicked:5139  Download:2825  Cited:4  <Full Text>
Journal of Zhejiang University Science C  2013 Vol.14 No.1 P.65-74  DOI:10.1631/jzus.C1200251
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