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1Mask synthesis and verification based on geometric model for surface micro-machined MEMS
Author(s):LI Jian-hua, LIU Yu-sheng, GAO Shu...  Clicked:6147  Download:2949  Cited:0  <Full Text>
Journal of Zhejiang University Science A  2005 Vol.6 No.9 P.1007-1010  DOI:10.1631/jzus.2005.A1007
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