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Abstract: In this study, we designed, fabricated, and characterized single-layer and stacked EHD pumps and applied them to drive an eccentric actuator. The proposed single EHD pumps were composed of transparent base and covers, and conductive copper electrodes. To boost the output power, we also developed stacked EHD pumps, made of four layers of EHD pumps. We used the Novec HFE 7300 as the pumping medium. The pumps and eccentric actuators were realized by using the two methods of digital fabrication and replication mold, respectively.

基于堆叠式电动液压泵驱动的偏心执行器

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