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Abstract: With the widespread adoption of ultra-precision machining (UPM) in manufacturing, accurately monitoring the temperature within micro-scale cutting zones has become crucial for ensuring machining quality and tool longevity. This review comprehensively evaluates modern in-process cutting temperature measurement methods, comparing conventional approaches and emerging technologies. Thermal conduction-based and radiation-based measurement paradigms are analyzed in terms of their merits, limitations, and domain-specific applicability, particularly with regard to the unique challenges involving micro-scale cutting zones in UPM. Special emphasis is placed on micro-scale sensor-integrated tools and self-sensing tools that enable real-time thermal monitoring at cutting edges. Furthermore, we explore thermal monitoring and management techniques for atomic and close-to-atomic scale manufacturing (ACSM), as well as the transformative potential of emerging technologies like artificial intelligence (AI), internet of things (IoT), and data fusion for machining temperature measurement. This review may serve as a reference for UPM cutting temperature measurement research, helping foster the development of optimized process control technologies.

超精密加工过程中的切削温度在线测量：综述与未来展望

作者：刘士荃，丁钰琪，夏凯阳，李辉，安亮，李忠伟，陈远流
机构：浙江大学，流体动力基础件与机电系统全国重点实验室，中国杭州，310058
概要：随着超精密加工技术在高精度制造领域广泛应用，准确监测切削微区温度对保障加工表面质量与刀具寿命至关重要。本文总结了超精密切削过程中切削温度在线测量领域的最新进展，深入分析各种方法的优势、局限性和应用场景，并展望人工智能、物联网等新兴技术在微纳米尺度与原子尺度切削温度监测领域的应用潜力。传统切削测温方法虽然在部分宏观切削尺度中成效显著，但在微纳米尺度的超精密切削加工中应用仍面临空间分辨率、响应速度及动态性能等瓶颈，难以满足微纳米尺度切削区域的测温需求。随着微型传感器与自感温切削刀具技术的持续发展，新型切削测温方法在高空间分辨温度监测、实时反馈及自适应控制等方面展现出显著优势。智能传感器与物联网的发展实现了实时数据采集与远程监控，显著推进超精密切削加工微区温度的控制进程。通过整合多传感器数据并利用人工智能进行数据分析，可实现更精准智能的温度控制，最终提升刀具寿命、减少加工缺陷并优化生产效率。

关键词：切削温度测量；超精密加工；切削状态在线监测；智能传感器

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