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| 1 | An in-plane low-noise accelerometer fabricated with an improved process flow Author(s):Xu-dong ZHENG, Zhong-he JIN, Yue-l... Clicked:8018 Download:4802 Cited:7 <Full Text> Journal of Zhejiang University Science A 2009 Vol.10 No.10 P.1413-1420 DOI:10.1631/jzus.A0820757 |