| index | Title |
| 1 | Preparation of AlN thin films for film bulk acoustic resonator application by radio frequency sputtering Author(s):Kan LI, Hao JIN, De-miao WANG, Yi-... Clicked:8979 Download:4566 Cited:3 <Full Text> Journal of Zhejiang University Science A 2009 Vol.10 No.3 P.464-470 DOI:10.1631/jzus.A0820572 |