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| 1 | AN ULTRAHIGH VACUUM CHEMICAL VAPOR DEPOSITION SYSTEM AND Si, GeSi EPITAXY ON A THREE-INCH Si WAFER Author(s):HUANG Jing-yun, YE Zhi-zhen, LU Hu... Clicked:7275 Download:3549 Cited:1 <Full Text> Journal of Zhejiang University Science 2000 Vol.1 No.4 P.427-430 DOI:10.1631/jzus.2000.0427 |