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1Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system
Author(s):Xia Zhang, Hao Wang, Xu-dong Zheng...  Clicked:7819  Download:3268  Cited:3  <Full Text>
Journal of Zhejiang University Science C  2010 Vol.11 No.12 P.1009-1015  DOI:10.1631/jzus.C0910757
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