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1AN ULTRAHIGH VACUUM CHEMICAL VAPOR DEPOSITION SYSTEM AND Si, GeSi EPITAXY ON A THREE-INCH Si WAFER
Author(s):HUANG Jing-yun, YE Zhi-zhen, LU Hu...  Clicked:5792  Download:2798  Cited:1  <Full Text>
Journal of Zhejiang University Science  2000 Vol.1 No.4 P.427-430  DOI:10.1631/jzus.2000.0427
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