| index | Title |
| 1 | Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk... Author(s):Jian-qiang Han, Ri-sheng Feng, Yan... Clicked:8992 Download:4151 Cited:4 <Full Text> Journal of Zhejiang University Science C 2013 Vol.14 No.1 P.65-74 DOI:10.1631/jzus.C1200251 |