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index	Title
1	An in-plane low-noise accelerometer fabricated with an improved process flow Author(s):Xu-dong ZHENG, Zhong-he JIN, Yue-l...  Clicked:6191  Download:3622  Cited:7  <Full Text> Journal of Zhejiang University Science A  2009 Vol.10 No.10 P.1413-1420  DOI:10.1631/jzus.A0820757

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