| index | Title |
| 1 | Preparation of AlN thin films for film bulk acoustic resonator application by radio frequency sputtering Author(s):Kan LI, Hao JIN, De-miao WANG, Yi-... Clicked:8992 Download:4577 Cited:3 <Full Text> Journal of Zhejiang University Science A 2009 Vol.10 No.3 P.464-470 DOI:10.1631/jzus.A0820572 |
| 2 | Thin film bulk acoustic wave filters with ring-dot electrodes Author(s):Jing Liu, Jian-ke Du, Ji Wang, Jia... Clicked:6090 Download:4829 Cited:0 <Full Text> <PPT> 2676 Journal of Zhejiang University Science A 2018 Vol.19 No.10 P.786-795 DOI:10.1631/jzus.A1700396 |