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| 1 | Mask synthesis and verification based on geometric model for surface micro-machined MEMS Author(s):LI Jian-hua, LIU Yu-sheng, GAO Shu... Clicked:6875 Download:3297 Cited:0 <Full Text> Journal of Zhejiang University Science A 2005 Vol.6 No.9 P.1007-1010 DOI:10.1631/jzus.2005.A1007 |