Deep search:Searching for "Coarse-fine dual stage" in 'KEYWORDGot 1 item.
index Title
1Design of a long range nano-scale resolution mechanism
Author(s):Shuo Hung Chang, Jen Bon Lee  Clicked:5465  Download:2738  Cited:1  <Full Text>
Journal of Zhejiang University Science A  2010 Vol.11 No.4 P.250-254  DOI:10.1631/jzus.A1000029
Journal of Zhejiang University-SCIENCE, 38 Zheda Road, Hangzhou 310027, China
Tel: +86-571-87952783; E-mail:
Copyright © 2000 - 2024 Journal of Zhejiang University-SCIENCE