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1Displacement measuring grating interferometer: a review
Author(s):Peng-cheng Hu, Di Chang, Jiu-bin T...  Clicked:7799  Download:4509  Cited:0  <Full Text>  <PPT> 1653
Frontiers of Information Technology & Electronic Engineering  2019 Vol.20 No.5 P.631-654  DOI:10.1631/FITEE.1800708
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