CLC number: TH744.3; TH822
On-line Access: 2019-06-10
Received: 2018-11-07
Revision Accepted: 2019-02-23
Crosschecked: 2019-05-08
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Peng-cheng Hu, Di Chang, Jiu-bin Tan, Rui-tao Yang, Hong-xing Yang, Hai-jin Fu. Displacement measuring grating interferometer: a review[J]. Frontiers of Information Technology & Electronic Engineering, 2019, 20(5): 631-654.
@article{title="Displacement measuring grating interferometer: a review",
author="Peng-cheng Hu, Di Chang, Jiu-bin Tan, Rui-tao Yang, Hong-xing Yang, Hai-jin Fu",
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volume="20",
number="5",
pages="631-654",
year="2019",
publisher="Zhejiang University Press & Springer",
doi="10.1631/FITEE.1800708"
}
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Abstract: A grating interferometer, called the “optical encoder,” is a commonly used tool for precise displacement measurements. In contrast to a laser interferometer, a grating interferometer is insensitive to the air refractive index and can be easily applied to multi-degree-of-freedom measurements, which has made it an extensively researched and widely used device. Classified based on the measuring principle and optical configuration, a grating interferometer experiences three distinct stages of development: homodyne, heterodyne, and spatially separated heterodyne. Compared with the former two, the spatially separated heterodyne grating interferometer could achieve a better resolution with a feature of eliminating periodic nonlinear errors. Meanwhile, numerous structures of grating interferometers with a high optical fold factor, a large measurement range, good usability, and multi-degree-of-freedom measurements have been investigated. The development of incremental displacement measuring grating interferometers achieved in recent years is summarized in detail, and studies on error analysis of a grating interferometer are briefly introduced.
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