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1A trapezoidal cantilever density sensor based on MEMS technology
Author(s):Li-bo Zhao, Long-qi Xu, Gui-ming Z...  Clicked:6396  Download:2838  Cited:2  <Full Text>
Journal of Zhejiang University Science C  2013 Vol.14 No.4 P.274-278  DOI:10.1631/jzus.C12MNT06
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