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1Two-step gate-recess process combining selective wet-etching and digital wet-etching for InAlAs/InGaAs InP-...
Author(s):Ying-hui Zhong, Shu-xiang Sun, Wen...  Clicked:5517  Download:2268  Cited:0  <Full Text>  <PPT> 1874
Frontiers of Information Technology & Electronic Engineering  2017 Vol.18 No.8 P.1180-1185  DOI:10.1631/FITEE.1601121
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