JZUS - Journal of Zhejiang University SCIENCE

Journal of Zhejiang University SCIENCE A

Accepted manuscript available online (unedited version)

Piezoelectric ultrasonic coupling-based polishing of micro-tapered holes with abrasive flow

Author(s): Gaoan ZHENG^1, ², Xiaoxing WENG^1, ⁴, Tong WANG³, Pu XU¹, Weixin XU¹, Lin LI¹, Xuefeng XU¹, Dapeng TAN¹
Affiliation(s): ¹College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou 310014, China; more
Corresponding email(s): linli@zjut.edu.cn, tandapeng@zjut.edu.cn
Key Words: Abrasive flow finishing; micro-tapered holes; Piezoelectric-ultrasonic coupling-based polishing; surface quality; polishing efficiency

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Gaoan ZHENG^1,², Xiaoxing WENG^1,⁴, Tong WANG³, Pu XU¹, Weixin XU¹, Lin LI¹, Xuefeng XU¹, Dapeng TAN¹. Piezoelectric ultrasonic coupling-based polishing of micro-tapered holes with abrasive flow[J]. Journal of Zhejiang University Science A,in press.Frontiers of Information Technology & Electronic Engineering,in press.https://doi.org/10.1631/jzus.A2400343

@article{title="Piezoelectric ultrasonic coupling-based polishing of micro-tapered holes with abrasive flow",
author="Gaoan ZHENG^1,², Xiaoxing WENG^1,⁴, Tong WANG³, Pu XU¹, Weixin XU¹, Lin LI¹, Xuefeng XU¹, Dapeng TAN¹",
journal="Journal of Zhejiang University Science A",
year="in press",
publisher="Zhejiang University Press & Springer",
doi="https://doi.org/10.1631/jzus.A2400343"
}

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%A Xiaoxing WENG^1
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%A Tong WANG³
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%A Dapeng TAN¹
%J Journal of Zhejiang University SCIENCE A
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doi="https://doi.org/10.1631/jzus.A2400343"

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A1 - Pu XU¹
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A1 - Lin LI¹
A1 - Xuefeng XU¹
A1 - Dapeng TAN¹
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doi="https://doi.org/10.1631/jzus.A2400343"

Abstract
Chinese Summary
Academic Network
Reviewer Comment

Abstract: The primary determinant of microfluidic chip performance is the surface quality of the micro-tapered holes. Due to the small scale of these holes and the high hardness of the surface attachments, the commonly used abrasive jet polishing method can encounter difficulties. Therefore, we propose a novel active multiphase field material removal technique. This technique is based on piezoelectric ultrasonically coupled abrasive particle flow. To study the connection between the impulse properties of the flow field and the micro-tapered hole’s asymptotic expansion-contraction process, a multiphase hybrid fluid dynamics model is established. Simultaneously, we investigate the process of abrasive-wall contact during the cycles of expansion and contraction, revealing the effects of erosion and polishing on different areas of the hole surface. To achieve accurate regu-lation of a desired polishing area, a quantitative relationship between the vibrational properties of piezoelectric ceramics and the erosional effect of micro-tapered holes is established. Finally, an experimental platform for micro-tapered hole polishing is built to validate the method.

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