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1A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segments and control sites
Author(s):Bin Lin, Xiao-lang Yan, Zheng Shi, Yi-wei Yang  Clicked:11027  Download:5330  Cited:4  <Full Text>
Journal of Zhejiang University Science C  2011 Vol.12 No.5 P.436-442  DOI:10.1631/jzus.C1000219
2SVM based layout retargeting for fast and regularized inverse lithography
Author(s):Kai-sheng Luo, Zheng Shi, Xiao-lang Yan, Zhen Geng  Clicked:11456  Download:5226  Cited:5  <Full Text>  <PPT> 2935
Journal of Zhejiang University Science C  2014 Vol.15 No.5 P.390-400  DOI:10.1631/jzus.C1300357
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