CLC number: TP212
On-line Access: 2013-04-03
Received: 2012-09-20
Revision Accepted: 2013-01-14
Crosschecked: 2013-03-12
Cited: 22
Clicked: 8459
Ji-jun Xiong, Shi-jun Zheng, Ying-ping Hong, Jun Li, Ying-lin Wang, Wei Wang, Qiu-lin Tan. Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology[J]. Journal of Zhejiang University Science C, 2013, 14(4): 258-263.
@article{title="Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology",
author="Ji-jun Xiong, Shi-jun Zheng, Ying-ping Hong, Jun Li, Ying-lin Wang, Wei Wang, Qiu-lin Tan",
journal="Journal of Zhejiang University Science C",
volume="14",
number="4",
pages="258-263",
year="2013",
publisher="Zhejiang University Press & Springer",
doi="10.1631/jzus.C12MNT04"
}
%0 Journal Article
%T Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology
%A Ji-jun Xiong
%A Shi-jun Zheng
%A Ying-ping Hong
%A Jun Li
%A Ying-lin Wang
%A Wei Wang
%A Qiu-lin Tan
%J Journal of Zhejiang University SCIENCE C
%V 14
%N 4
%P 258-263
%@ 1869-1951
%D 2013
%I Zhejiang University Press & Springer
%DOI 10.1631/jzus.C12MNT04
TY - JOUR
T1 - Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology
A1 - Ji-jun Xiong
A1 - Shi-jun Zheng
A1 - Ying-ping Hong
A1 - Jun Li
A1 - Ying-lin Wang
A1 - Wei Wang
A1 - Qiu-lin Tan
J0 - Journal of Zhejiang University Science C
VL - 14
IS - 4
SP - 258
EP - 263
%@ 1869-1951
Y1 - 2013
PB - Zhejiang University Press & Springer
ER -
DOI - 10.1631/jzus.C12MNT04
Abstract: High temperature co-fired ceramics (HTCCs) have wide applications with stable mechanical properties, but they have not yet been used to fabricate sensors. By introducing the wireless telemetric sensor system and ceramic structure embedding a pressure-deformable cavity, the designed sensors made from HTCC materials (zirconia and 96% alumina) are fabricated, and their capacities for the pressure measurement are tested using a wireless interrogation method. Using the fabricated sensor, a study is conducted to measure the atmospheric pressure in a sealed vessel. The experimental sensitivity of the device is 2 Hz/Pa of zirconia and 1.08 Hz/Pa of alumina below 0.5 MPa with a readout distance of 2.5 cm. The described sensor technology can be applied for monitoring of atmospheric pressure to evaluate important component parameters in harsh environments.
[1]Birdsell, E., Allen, M.G., 2006. Wireless Chemical Sensors for High Temperature Environments. Solid-State Sensors, Actuatos, and Microsystems Workshop, p.212-215.
[2]Birdsell, E., Park, J., Allen, M., 2004. Wireless Ceramic Sensors Operating in High Temperature Environments. 40th AIAA/ASME/SAE/ASEE Joint Propulsion Conf. and Exhibit.
[3]Birol, H., Maeder, T., Ryser, P., 2006. Processing of graphite-based sacrificial layer for microfabrication of low temperature co-fired ceramic (LTCC). Sens. Actuat. A, 130-131:560-567.
[4]Chen, P., 2008. Implantable Wireless Intraocular Pressure Sensor. PhD Thesis, California Institute of Technology, p.6-27.
[5]Chen, P.J., Rodger, D.C., Saati, S., Humayun, M.S., Tai, Y.C., 2008. Microfabricated implantable parylene-based wireless passive intraocular pressure sensors. J. Microelectromech. Syst., 17(6):1342-1351.
[6]Cullinane, W.F., Strange, R.R., 1999. Gas turbine engine validation instrumentation: measurements, sensors, and needs. SPIE, 3852:2-13.
[7]Fonseca, M.A., 2007. Polymer/Ceramic Wireless MEMS Pressure Sensors for Harsh Environments: High Temperature and Biomedical Applications. PhD Thesis, Georgia Institute of Technology.
[8]Fonseca, M.A., English, J., Allen, M., 2002. Wireless micro-machined ceramic pressure sensor for high temperature application. J. Microelectromech. Syst., 8(4):1-3.
[9]Imanaka, Y., 2004. Multilayered Low Temperature Cofired Ceramics (LTCC) Technology. Springer, New York.
[10]Malecha, K., Golonka, L., 2008. Microchannel fabrication process in LTCC ceramic. Microelectron. Rel., 48(6):866-871.
[11]Ong, J.B., You, Z., Mills-Beale, J., Tan, E.L., Pereles, B.D., Ong, K.G., 2008. A wireless, passive embedded sensor for real-time monitoring of water content in civil engineering materials. IEEE Sens. J., 8(12):2053-2058.
[12]Pulliam, W.J., Russler, P.M., Fielder, R.S., 2002. High temperature high-bandwidth fiber-optic MEMS pressure-sensor technology for turbine engine component testing. SPIE, 4578:229-238.
[13]Radosavljevic, G.J., Zivanov, L.D., Smetana, W., Maric, A.M., Unger, M., Nad, L.F., 2009. A wireless embedded resonant pressure sensors fabricated in the LTCC technology. IEEE Sens. J., 9(12):1956-1962.
[14]Timoshenko, S., 1984. Theory of Plates and Shells. McGraw Hill, London.
[15]Wahlers, R.L., Stein, S.J., Feingold, A.H., Bless, P.W., 2012. Ceramic Tapes for Wireless Applications. Available from http://electro-science.com/publications/ACerS%20St.Louis'00.pdf [Accessed on June 2, 2012].
Open peer comments: Debate/Discuss/Question/Opinion
<1>