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A novel fabrication of meso-porous silica film by sol-gol of TEOS
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Yin Ming-zhi, Yao Xi, ZHang Liang-ying. A novel fabrication of meso-porous silica film by sol-gol of TEOS[J]. Journal of Zhejiang University Science A, 2004, 5(4): 422-427.
@article{title="A novel fabrication of meso-porous silica film by sol-gol of TEOS",
author="Yin Ming-zhi, Yao Xi, ZHang Liang-ying",
journal="Journal of Zhejiang University Science A",
volume="5",
number="4",
pages="422-427",
year="2004",
publisher="Zhejiang University Press & Springer",
doi="10.1631/jzus.2004.0422"
}
%0 Journal Article
%T A novel fabrication of meso-porous silica film by sol-gol of TEOS
%A Yin Ming-zhi
%A Yao Xi
%A ZHang Liang-ying
%J Journal of Zhejiang University SCIENCE A
%V 5
%N 4
%P 422-427
%@ 1869-1951
%D 2004
%I Zhejiang University Press & Springer
%DOI 10.1631/jzus.2004.0422
TY - JOUR
T1 - A novel fabrication of meso-porous silica film by sol-gol of TEOS
A1 - Yin Ming-zhi
A1 - Yao Xi
A1 - ZHang Liang-ying
J0 - Journal of Zhejiang University Science A
VL - 5
IS - 4
SP - 422
EP - 427
%@ 1869-1951
Y1 - 2004
PB - Zhejiang University Press & Springer
ER -
DOI - 10.1631/jzus.2004.0422
Abstract: A homogeneous crack-free nano- or meso-porous silica films on silicon was fabricated by colloidal silica sol derived by hydrolyzing tetraethyl orthosilicate (TEOS) catalyzing with (C4H9)4N+OH- in water medium. the solution with ratio of H2O/TEOS≥15, R4N+ and glycerol as templates, combining with the hydrolyzed intermediate, controlled the silica aggregating; the templated silica film with heterostructure was developed into homogeneous nano-porous then meso-porous silica films after being annealed from 750 °C to 850 °C; the formation mechanism of the porous silica films was discussed; morphologies of the silica films were characterized. the refractive indexes of the porous silica films were 1.256-1.458, the thermal conductivity < 0.7 W/m/K. The fabricating procedure and the sequence had not been reported before.
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