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On-line Access: 2024-08-27

Received: 2023-10-17

Revision Accepted: 2024-05-08

Crosschecked: 2010-09-19

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Citations:  Bibtex RefMan EndNote GB/T7714

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Journal of Zhejiang University SCIENCE A 2010 Vol.11 No.10 P.722-726

http://doi.org/10.1631/jzus.A1000175


Effect of template shape on metal nanoimprinting: a dislocation dynamics study


Author(s):  Yun-he Zhang, Lucia Nicola

Affiliation(s):  Department of Materials Science and Engineering, Delft University of Technology, 2628 CD Delft, the Netherlands

Corresponding email(s):   l.nicola@tudelft.nl

Key Words:  Nanoimprinting, Dislocation dynamics, Simulations



Abstract: 
dislocation dynamics simulations are performed to investigate the effect of template shape on the nanoimprinting of metal layers. To this end, metal thin films are imprinted by a rigid template made of an array of equispaced indenters of various shapes, i.e., rectangular, wedge, and circular. The geometry of the indenters is chosen such that the contact area is approximately the same at the final imprinting depth. Results show that, for all template shapes, the final patterns strongly depend on the dislocation activity, and that each imprint differs from the neighboring ones. Large material pile ups appear between the imprints, such that polishing of the metal layer is suggested for application of the patterns in electronics. Rectangular indenters require the lowest imprinting force and achieve the deepest retained imprints.

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