CLC number: TB53
On-line Access: 2024-08-27
Received: 2023-10-17
Revision Accepted: 2024-05-08
Crosschecked: 2021-05-07
Cited: 0
Clicked: 6196
Citations: Bibtex RefMan EndNote GB/T7714
Bo Zhao, Weijia Shi, Bingquan Wang, Jiubin Tan. An adjustable anti-resonance frequency controller for a dual-stage actuation semi-active vibration isolation system[J]. Frontiers of Information Technology & Electronic Engineering, 2021, 22(10): 1390-1401.
@article{title="An adjustable anti-resonance frequency controller for a dual-stage actuation semi-active vibration isolation system",
author="Bo Zhao, Weijia Shi, Bingquan Wang, Jiubin Tan",
journal="Frontiers of Information Technology & Electronic Engineering",
volume="22",
number="10",
pages="1390-1401",
year="2021",
publisher="Zhejiang University Press & Springer",
doi="10.1631/FITEE.2000373"
}
%0 Journal Article
%T An adjustable anti-resonance frequency controller for a dual-stage actuation semi-active vibration isolation system
%A Bo Zhao
%A Weijia Shi
%A Bingquan Wang
%A Jiubin Tan
%J Frontiers of Information Technology & Electronic Engineering
%V 22
%N 10
%P 1390-1401
%@ 2095-9184
%D 2021
%I Zhejiang University Press & Springer
%DOI 10.1631/FITEE.2000373
TY - JOUR
T1 - An adjustable anti-resonance frequency controller for a dual-stage actuation semi-active vibration isolation system
A1 - Bo Zhao
A1 - Weijia Shi
A1 - Bingquan Wang
A1 - Jiubin Tan
J0 - Frontiers of Information Technology & Electronic Engineering
VL - 22
IS - 10
SP - 1390
EP - 1401
%@ 2095-9184
Y1 - 2021
PB - Zhejiang University Press & Springer
ER -
DOI - 10.1631/FITEE.2000373
Abstract: In the semiconductor manufacturing industry, the dynamic model of a controlled object is usually obtained from a frequency sweeping method before motion control. However, the existing isolators cannot properly isolate the disturbance of the inertial force on the platform base during frequency sweeping (the frequency is between 0 Hz and the natural frequency). In this paper, an adjustable anti-resonance frequency controller for a dual-stage actuation semi-active vibration isolation system (DSA-SAVIS) is proposed. This system has a significant anti-resonance characteristic; that is, the vibration amplitude can drop to nearly zero at a particular frequency, which is called the anti-resonance frequency. The proposed controller is designed to add an adjustable anti-resonance frequency to fully use this unique anti-resonance characteristic. Experimental results show that the closed-loop transmissibility is less than −15 dB from 0 Hz to the initial anti-resonance frequency. Furthermore, it is less than −30 dB around an added anti-resonance frequency which can be adjusted from 0 Hz to the initial anti-resonance frequency by changing the parameters of the proposed controller. With the proposed controller, the disturbance amplitude of the payload decays from 4 to 0.5 mm/s with a reduction of 87.5% for the impulse disturbance applied to the platform base. Simultaneously, the system can adjust the anti-resonance frequency point in real time by tracking the frequency sweeping disturbances, and a good vibration isolation performance is achieved. This indicates that the DSA-SAVIS and the proposed controller can be applied in the guarantee of an ultra-low vibration environment, especially at frequency sweeping in the semiconductor manufacturing industry.
[1]Alujević N, Čakmak D, Wolf H, et al., 2018. Passive and active vibration isolation systems using inerter. J Sound Vib, 418:163-183.
[2]Bai J, Daaoub A, Sangtarash S, et al., 2019. Anti-resonance features of destructive quantum interference in single-molecule thiophene junctions achieved by electrochemical gating. Nat Mater, 18(4):364-369.
[3]Brennan MJ, 1997. Vibration control using a tunable vibration neutralizer. Proc Inst Mech Eng C J Mech Eng Sci, 211(2):91-108.
[4]Bronowicki AJ, MacDonald R, Gursel Y, et al., 2003. Dual stage passive vibration isolation for optical interferometer missions. Proc SPIE 4852, Interferometry in Space, p.753-763.
[5]Butler H, 2011. Position control in lithographic equipment. IEEE Contr Syst Mag, 31(5):28-47.
[6]Carre H, Doxtator RH, Duffy MC, 1982. Semiconductor manufacturing technology at IBM. IBM J Res Dev, 26(5):528-531.
[7]Coronado A, Trindade MA, Sampaio R, 2013. Frequency-dependent viscoelastic models for passive vibration isolation systems. Shock Vib, 9(4-5):862159.
[8]Davis CL, Lesieutre GA, 2000. An actively tuned solid-state vibration absorber using capacitive shunting of piezoelectric stiffness. J Sound Vib, 232(3):601-617.
[9]Ding D, Torres JA, Pan DZ, 2011. High performance lithography hotspot detection with successively refined pattern identifications and machine learning. IEEE Trans Comput Aided Des Integr Circ Syst, 30(11):1621-1634.
[10]Franček P, Petošić A, Budimir M, et al., 2019. Electrical resonance/antiresonance characterization of NDT transducer and possible optimization of impulse excitation signals width and their types. NDT E Int, 106:29-41.
[11]Ismagilov FR, Papini L, Vavilov VE, et al., 2020. Design and performance of a high-speed permanent magnet generator with amorphous alloy magnetic core for aerospace applications. IEEE Trans Ind Electron, 67(3):1750-1758.
[12]Ito S, Neyer D, Pirker S, et al., 2015. Atomic force microscopy using voice coil actuators for vibration isolation. Proc IEEE Int Conf on Advanced Intelligent Mechatronics, p.470-475.
[13]Ito S, Unger S, Schitter G, 2017. Vibration isolator carrying atomic force microscope’s head. Mechatronics, 44:32-41.
[14]Kamesh D, Pandiyan R, Ghosal A, 2012. Passive vibration isolation of reaction wheel disturbances using a low frequency flexible space platform. J Sound Vib, 331(6):1310-1330.
[15]Lee KW, Noh YJ, Arai Y, et al., 2011. Precision measurement of micro-lens profile by using a force-controlled diamond cutting tool on an ultra-precision lathe. Int J Precis Technol, 2(2-3):211-225.
[16]Li D, Wang B, Tong Z, et al., 2019. On-machine surface measurement and applications for ultra-precision machining: a state-of-the-art review. Int J Adv Manuf Technol, 104(1-4):831-847.
[17]Liu H, Cui SP, Liu YW, et al., 2018. Design and vibration suppression control of a modular elastic joint. Sensors, 18(6):1869.
[18]Matichard F, Lantz B, Mittleman R, et al., 2015. Seismic isolation of advanced LIGO: review of strategy, instrumentation and performance. Class Quantum Grav, 32(18):185003.
[19]Nagaya K, Kurusu A, Ikai S, et al., 1999. Vibration control of a structure by using a tunable absorber and an optimal vibration absorber under auto-tuning control. J Sound Vib, 228(4):773-792.
[20]Nelson PG, 1991. An active vibration isolation system for inertial reference and precision measurement. Rev Sci Instrum, 62(9):2069-2075.
[21]Niu JC, Zhao GQ, Hu XX, 2005. Active control of structural vibration by piezoelectric stack actuators. J Zhejiang Univ Sci, 6(9):974-979.
[22]Niu WC, Li B, Xin T, et al., 2018. Vibration active control of structure with parameter perturbation using fractional order positive position feedback controller. J Sound Vib, 430:101-114.
[23]Qiu ZC, Wang XF, Zhang XM, et al., 2018. A novel vibration measurement and active control method for a hinged flexible two-connected piezoelectric plate. Mech Syst Signal Process, 107:357-395.
[24]Qu D, Liu XD, Liu GT, et al., 2019. Analysis of vibration isolation performance of parallel air spring system for precision equipment transportation. Meas Contr, 52(3-4):291-302.
[25]Song CS, Xiao Y, Yu CC, et al., 2018. H∞ active control of frequency-varying disturbances in a main engine on the floating raft vibration isolation system. J Low Freq Noise Vib Active Contr, 37(2):199-215.
[26]Sun T, Huang ZY, Chen DY, et al., 2003. Signal frequency based self-tuning fuzzy controller for semi-active suspension system. J Zhejiang Univ Sci, 4(4):426-432.
[27]Suzuki Y, Abe N, 2013. Variable stiffness system for semi-active vibration control by frequency. Proc Conf of Kanto Branch, p.923-928.
[28]Wang H, Li B, Liu Y, et al., 2019. Low-frequency, broadband piezoelectric vibration energy harvester with folded trapezoidal beam. Rev Sci Instrum, 90(3):035001.
[29]Xu JW, Yang XF, Li W, et al., 2020. Research on semi-active vibration isolation system based on electromagnetic spring. Mech Ind, 21(1):101.
[30]Xu YF, Liao H, Liu L, et al., 2015. Modeling and robust H-infinite control of a novel non-contact ultra-quiet Stewart spacecraft. Acta Astronaut, 107:274-289.
[31]Yang BB, Hu YF, Vicario F, et al., 2017. Improvements of magnetic suspension active vibration isolation for floating raft system. Int J Appl Electromagn Mech, 53(2):193-209.
[32]Yin SH, Xu ZQ, Yu JW, 2012. The composite ultra-precision processing technology for the small aspheric mould of stainless steel. Adv Mater Res, 497:176-179.
[33]Yong C, Zimcik DG, Wickramasinghe VK, et al., 2004. Development of the smart spring for active vibration control of helicopter blades. J Int Mat Syst Struct, 15(1):37-47.
[34]Zhang F, Shao SB, Tian Z, et al., 2019. Active-passive hybrid vibration isolation with magnetic negative stiffness isolator based on Maxwell normal stress. Mech Syst Signal Process, 123:244-263.
[35]Zhao C, Chen DY, 2008. Semi-active fuzzy sliding mode control for floating raft isolation system. Chin J Mech Eng, 44(2):163-169 (in Chinese).
[36]Zuo L, Slotine JJE, 2005. Robust vibration isolation via frequency-shaped sliding control and modal decomposition. J Sound Vib, 285(4-5):1123-1149.
Open peer comments: Debate/Discuss/Question/Opinion
<1>