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CLC number: TB3

On-line Access: 2010-10-05

Received: 2010-04-16

Revision Accepted: 2010-07-15

Crosschecked: 2010-09-19

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Journal of Zhejiang University SCIENCE A 2010 Vol.11 No.10 P.722-726

http://doi.org/10.1631/jzus.A1000175


Effect of template shape on metal nanoimprinting: a dislocation dynamics study


Author(s):  Yun-he Zhang, Lucia Nicola

Affiliation(s):  Department of Materials Science and Engineering, Delft University of Technology, 2628 CD Delft, the Netherlands

Corresponding email(s):   l.nicola@tudelft.nl

Key Words:  Nanoimprinting, Dislocation dynamics, Simulations


Yun-he Zhang, Lucia Nicola. Effect of template shape on metal nanoimprinting: a dislocation dynamics study[J]. Journal of Zhejiang University Science A, 2010, 11(10): 722-726.

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author="Yun-he Zhang, Lucia Nicola",
journal="Journal of Zhejiang University Science A",
volume="11",
number="10",
pages="722-726",
year="2010",
publisher="Zhejiang University Press & Springer",
doi="10.1631/jzus.A1000175"
}

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%A Yun-he Zhang
%A Lucia Nicola
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%I Zhejiang University Press & Springer
%DOI 10.1631/jzus.A1000175

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T1 - Effect of template shape on metal nanoimprinting: a dislocation dynamics study
A1 - Yun-he Zhang
A1 - Lucia Nicola
J0 - Journal of Zhejiang University Science A
VL - 11
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SP - 722
EP - 726
%@ 1673-565X
Y1 - 2010
PB - Zhejiang University Press & Springer
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DOI - 10.1631/jzus.A1000175


Abstract: 
dislocation dynamics simulations are performed to investigate the effect of template shape on the nanoimprinting of metal layers. To this end, metal thin films are imprinted by a rigid template made of an array of equispaced indenters of various shapes, i.e., rectangular, wedge, and circular. The geometry of the indenters is chosen such that the contact area is approximately the same at the final imprinting depth. Results show that, for all template shapes, the final patterns strongly depend on the dislocation activity, and that each imprint differs from the neighboring ones. Large material pile ups appear between the imprints, such that polishing of the metal layer is suggested for application of the patterns in electronics. Rectangular indenters require the lowest imprinting force and achieve the deepest retained imprints.

Darkslateblue:Affiliate; Royal Blue:Author; Turquoise:Article

Reference

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[2]Guo, L.J., 2007. Nanoimprint lithography: methods and material requirements. Advanced Materials, 19(4):495-513.

[3]Nicola, L., Bower, A.F., Kim, K.S., Needleman, A., van der Giessen, E., 2008. Multi-asperity contact: A comparison between discrete dislocation and crystal plasticity predictions. Philosophical Magazine, 88(30-32):3713-3729.

[4]Rice, J.R., 1987. Tensile crack tip fields in elastic-ideally plastic crystals. Mechanics of Materials, 6(4):317-335.

[5]van der Giessen, E., Needleman, A., 1995. Discrete dislocation plasticity: a simple planar model. Modelling and Simulation in Materials Science and Engineering, 3(5):689-735.

[6]Widjaja, A., van der Giessen, E., Needleman, A., 2005. Discrete dislocation modelling of submicron indentation. Materials Science and Engineering: A, 400-401(25):456-459.

[7]Zhang, Y.H., van der Giessen, E., Nicola, L., 2010. Discrete dislocation simulations of the flattening of nanoimprinted surfaces. Modelling and Simulation in Materials Science and Engineering, 18(3):034006.

[8]Zong, Z., Lou, J., Adewoye, O.O., Elmustafa, A.A., Hammad, F., Soboyejo, W.O., 2006. Indentation size effect in the nano and microhardness of fcc single crystal metals. Materials Science and Engineering: A, 434(1-2):178-187.

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