Deep search:Searching for "magnetron sputtering" in 'ABSTRACTGot 4 items.
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1Characterization of DC magnetron sputtering deposited thin films of TiN for SBN/MgO/TiN/Si structural waveg...
Author(s):Xu Xuan-qian, Ye Hui, Zou Tong  Clicked:6828  Download:4897  Cited:0  <Full Text>
Journal of Zhejiang University Science A  2006 Vol.7 No.3 P.472-476  DOI:10.1631/jzus.2006.A0472
2Preparation of AlN thin films for film bulk acoustic resonator application by radio frequency sputtering
Author(s):Kan LI, Hao JIN, De-miao WANG, Yi-...  Clicked:7372  Download:3809  Cited:3  <Full Text>
Journal of Zhejiang University Science A  2009 Vol.10 No.3 P.464-470  DOI:10.1631/jzus.A0820572
3High Q, high frequency, high overtone bulk acoustic resonator with ZnO films
Author(s):Meng-wei Liu, Ming-bo Zhu, Jun-hon...  Clicked:7640  Download:3315  Cited:1  <Full Text>
Journal of Zhejiang University Science C  2013 Vol.14 No.4 P.279-282  DOI:10.1631/jzus.C12MNT07
4Band-gap tunable (GaxIn1−x)2O3 ...
Author(s):Fabi Zhang, Jinyu Sun, Haiou Li, J...  Clicked:6500  Download:15781  Cited:0  <Full Text>  <PPT> 1507
Frontiers of Information Technology & Electronic Engineering  2021 Vol.22 No.10 P.1370-1378  DOI:10.1631/FITEE.2000330
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