| index | Title |
| 1 | Mask synthesis and verification based on geometric model for surface micro-machined MEMS Author(s):LI Jian-hua, LIU Yu-sheng, GAO Shu... Clicked:9004 Download:4296 Cited:0 <Full Text> Journal of Zhejiang University Science A 2005 Vol.6 No.9 P.1007-1010 DOI:10.1631/jzus.2005.A1007 |
| 2 | Regularized level-set-based inverse lithography algorithm for IC mask synthesis Author(s):Zhen Geng, Zheng Shi, Xiao-lang Ya... Clicked:9976 Download:5450 Cited:3 <Full Text> <PPT> 2999 Journal of Zhejiang University Science C 2013 Vol.14 No.10 P.799-807 DOI:10.1631/jzus.C1300050 |