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4 results found in all.
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1A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segments and control sites
Author(s):Bin Lin, Xiao-lang Yan, Zheng Shi, Yi-wei Yang  Clicked:11352  Download:5605  Cited:4  <Full Text>
Journal of Zhejiang University Science C  2011 Vol.12 No.5 P.436-442  DOI:10.1631/jzus.C1000219
2Erratum to: A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segments and control sites
Author(s):Bin Lin, Xiao-lang Yan, Zheng Shi, Yi-wei Yang  Clicked:7498  Download:3498  Cited:0  <Full Text>
Journal of Zhejiang University Science C  2011 Vol.12 No.7 P.614-614  DOI:10.1631/jzus.C10e0219
3Regularized level-set-based inverse lithography algorithm for IC mask synthesis
Author(s):Zhen Geng, Zheng Shi, Xiao-lang Yan, Kai-sheng Luo  Clicked:10039  Download:5474  Cited:3  <Full Text>  <PPT> 3033
Journal of Zhejiang University Science C  2013 Vol.14 No.10 P.799-807  DOI:10.1631/jzus.C1300050
4SVM based layout retargeting for fast and regularized inverse lithography
Author(s):Kai-sheng Luo, Zheng Shi, Xiao-lang Yan, Zhen Geng  Clicked:11960  Download:6119  Cited:5  <Full Text>  <PPT> 3078
Journal of Zhejiang University Science C  2014 Vol.15 No.5 P.390-400  DOI:10.1631/jzus.C1300357
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